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KMID : 1059520040480060663
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Journal of the Korean Chemical Society
2004 Volume.48 No. 6 p.663 ~ p.665
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Time-Dependent Cyclic Modulation Process of CH4 Gas Flow Rate in CH4-H2-O2 Plasma for the Enhancement of Diamond Film Characteristics
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Kim Sung-Hoon
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Abstract
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KEYWORD
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